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Ehrhorn (ETO) / ASTeX / MKS Repair List
All models may not be shown due to the large number of model variations.
ASTeX Microwave Power Supply AX2115
ASTeX Microwave Power Supply, 2.45Ghz C12932
ASTeX Microwave Power Supply, 2.45Ghz D13765
ASTeX Microwave Generator S-250
Astex / GAE / AGL / Gerling Microwave Power Supply, 2.45Ghz C12935
Astex / GAE / AGL / Gerling Microwave Power Supply, 2.45Ghz C13170
Astex / GAE / AGL / Gerling Microwave Power Supply, 2.45Ghz GL139
Astex / GAE / AGL / Gerling Microwave Power Supply, 2.45Ghz 94-1104
Astex / GAE / AGL / Gerling Microwave Power Supply, 2.45Ghz 94-1104-U
Astex / GAE / AGL / Gerling Microwave Power Supply, 2.45Ghz C12935-U
ASTeX Microwave, 3.5 kW D13449
ASTeX Microwave, 6.0 kW D13614
ASTeX Microwave, SXHRC SXHRC
ASTeX Magnetron Head FI10002
0190-36677 ABX-X434 System Controller PCB
0190-18155 DRX-X148 HV Diode Pair
0190-18156 KVX-X107 Ross Relay
0190-18181 80-S09-uW CVD RF Generator
0920-01076 80-S10-HP ETCH RF Generator
0190-02977 ABX-X355 System Controller
0190-01292 ARX-X490 Solid State Driver 1.5-2.5MHz
0190-18146 ARX-X248 Solid State Driver 13.56MHz
ARX-X267 Solid State Driver 1.5-2.5MHz
0190-36679 ARX-X256 2.3Mhz Watt Meter
0190-36680 ARX-X258 2.0MHz Watt Meter
0190-36681 ARX-X268 1.7MHz Watt Meter
0190-18139 ARX-X250 2.0MHz Watt Meter
0190-18145 ARX-X252 13.56MHZ Watt Meter
0190-00398 ARX-X491 D13450 Microwave Controller
0190-18128 D13449 Magnetron Head
RTX-7000 Replaced YU191B Long Life PA Tube
0540-01010 ARX-X216 PA Tube
0190-18138 ABX-X272 PS Control Board
0190-18136 ABX-X284 HV Capacitor Bank
ABX-X285 HV Filter Board
0190-18153 ABX-X286 24V Power Supply
0190-01954 ABX-X299 12V Power Supply
0190-36685 80-I01 ICM Module
0190-36684 80-P01-HP EPS Power Supply
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