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Mattson Repair List
All models may not be shown due to the large number of model variations.
Mattson Automatch, ICPSM, 13.56Mhz 553-09908-00
Mattson DUAL MATCH ICPSM
Mattson ICPHT - RFS-3019 553-21311-00
Mattson RFS 3016 - TYPE 1 SOURCE MATCH 553-19663-00
Mattson RFS 3018 - TYPE 2 SOURCE MATCH 553-19819-00
Mattson RFS 1017 - BIAS MATCH 553-21146-00
Mattson RFS 1019 -EXT. RANGE 1KW BIAS MATCH 553-24005-00
Mattson CVD MATCH RFS 2502 553-20343-00
Mattson SPLITTER,LO FREQ.,4-WAY 934-15008-00
Mattson SPLITTER,HI FREQ,2-WAY,3KW 934-15009-00
Mattson SPLITTER,HI FREQ,2-WAY,1.5KW 934-15010-00
Mattson I/F Operator, Mini Match 515-12031-00
Mattson 1KW - Splitter Metal 580-00097-00
Mattson ASSY, RF, DC Supply Filter 305-21262-00
Mattson RFS-711 553-16428-00
Mattson WATER COOLED BIAS MATCH (RFS-1018) 553-21984-00
Mattson RFS 3009, 3KW ICPSM 553-09908-00
Mattson RFS 3020,3KW ICPSM/DISABLE AUTOPRE. 553-22545-00
Mattson RFS1000W/ MOUNTED ENCL CTRL 553-00098-00
Mattson RFS1000W/ MOD SHUNT /ENCL CTRL 934-15016-00
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